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===== Laboratory Capabilities =====
==== Lab Capabilities Statement ====
===Magnetic Resonance Spectrometers===
{{:research:pml8:bruker.png?nolink&300 |}}Currently there are three state-of-the-art commercial ESR spectrometers manufactured by Bruker-Biospin in the lab. The systems operate at X-band frequencies (~9 to 10 GHz). One of the systems is equipped with an electron nuclear double resonance (ENDOR) capability which, for certain defects, allows determination of extremely detailed defect structure.

{{ :research:pml8:low_field.png?nolink&300|}}
Additionally, there are six electrically detected magnetic resonance (EDMR) spectrometers primarily utilized for spin dependent recombination (SDR). These systems are home made. Three systems operate at X-band (about 10 GHz), a fourth system operates at K-band (about 16 GHz), and the fifth and sixth systems operate at low frequencies, up to about 350MHz. To the best of our knowledge, these EDMR/SDR systems are the most sensitive anywhere in the study of semiconductor devices. With great effort and relatively ideal devices, these systems have a sensitivity of better than 1000 defects at room temperature in fully processed devices.\\ \\ \\


===Additional Apparatus===
  * A conventional MOS capacitance-versus-voltage system with a mercury probe
  * A Kelvin probe electrostatic voltmeter
  * Several corona discharge systems for contact-less application of dielectric bias
  * Ultraviolet illumination and vacuum ultraviolet systems useful for flooding oxides with electrons and holes
  * A wire bonder
  * Two ellipsometers
  * A semiconductor parameter analyzer
  * Two liquid helium cryostat systems for low temperature ESR, ENDOR, and EDMR measurements
  * Two liquid nitrogen cryostat systems for low temperature ESR, ENDOR, and EDMR measurements

===Miscellaneous===

A glove box, two fume hoods, one small tube furnace, a vacuum system for metal deposition, two nuclear magnetic resonance (NMR) Gaussmeters, and five Hall effect Gaussmeters. A few common electronics lab items include electrometers, constant current sources, power supplies, oscilloscopes, frequency counters, vacuum pumps, etc.

{{description>Dr. Patrick M Lenahan's Semiconductor Spectroscopy Research Group Facilities}}
{{keywords>PSU,Penn,State,PM,P,Patrick,Lenahan,101,EES,Semiconductor,Spectroscopy,Electron,Paramagnetic,Resonance,EPR,Electrically,Detected,Magnetic,Resonance,EDMR,Spectrometer}}