Currently there are three state-of-the-art commercial ESR spectrometers manufactured by Bruker-Biospin in the lab. The systems operate at X-band frequencies (~9 to 10 GHz). One of the systems is equipped with an electron nuclear double resonance (ENDOR) capability which, for certain defects, allows determination of extremely detailed defect structure.

Additionally, there are six electrically detected magnetic resonance (EDMR) spectrometers primarily utilized for spin dependent recombination (SDR). These systems are home made. Three systems operate at X-band (about 10 GHz), a fourth system operates at K-band (about 16 GHz), and the fifth and sixth systems operate at low frequencies, up to about 350MHz. To the best of our knowledge, these EDMR/SDR systems are the most sensitive anywhere in the study of semiconductor devices. With great effort and relatively ideal devices, these systems have a sensitivity of better than 1000 defects at room temperature in fully processed devices.

• A conventional MOS capacitance-versus-voltage system with a mercury probe
• A Kelvin probe electrostatic voltmeter
• Several corona discharge systems for contact-less application of dielectric bias
• Ultraviolet illumination and vacuum ultraviolet systems useful for flooding oxides with electrons and holes
• A wire bonder
• Two ellipsometers
• A semiconductor parameter analyzer
• Two liquid helium cryostat systems for low temperature ESR, ENDOR, and EDMR measurements
• Two liquid nitrogen cryostat systems for low temperature ESR, ENDOR, and EDMR measurements

A glove box, two fume hoods, one small tube furnace, a vacuum system for metal deposition, two nuclear magnetic resonance (NMR) Gaussmeters, and five Hall effect Gaussmeters. A few common electronics lab items include electrometers, constant current sources, power supplies, oscilloscopes, frequency counters, vacuum pumps, etc.